Self-Limiting Film Growth of Transparent Conducting In2O3 by Atomic Layer Deposition using Trimethylindium and Water Vapor

Published 2011 View Full Article

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Title
Self-Limiting Film Growth of Transparent Conducting In2O3 by Atomic Layer Deposition using Trimethylindium and Water Vapor
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 115, Issue 31, Pages 15384-15389
Publisher
American Chemical Society (ACS)
Online
2011-06-28
DOI
10.1021/jp2024389

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