Transfer of self-aligned spacer patterns for single-digit nanofabrication

Published 2015 View Full Article

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Title
Transfer of self-aligned spacer patterns for single-digit nanofabrication
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 26, Issue 8, Pages 085304
Publisher
IOP Publishing
Online
2015-02-06
DOI
10.1088/0957-4484/26/8/085304

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