Conformal Hermetic Sealing of Wireless Microelectronic Implantable Chiplets by Multilayered Atomic Layer Deposition (ALD)
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Title
Conformal Hermetic Sealing of Wireless Microelectronic Implantable Chiplets by Multilayered Atomic Layer Deposition (ALD)
Authors
Keywords
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Journal
ADVANCED FUNCTIONAL MATERIALS
Volume -, Issue -, Pages 1806440
Publisher
Wiley
Online
2018-12-13
DOI
10.1002/adfm.201806440
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Note: Only part of the references are listed.- Electrical and chemical characterizations of hafnium (IV) oxide films for biological lab-on-a-chip devices
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- A brief review of atomic layer deposition: from fundamentals to applications
- (2014) Richard W. Johnson et al. Materials Today
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- (2014) David A Schwarz et al. NATURE METHODS
- Wireless Neurosensor for Full-Spectrum Electrophysiology Recordings during Free Behavior
- (2014) Ming Yin et al. NEURON
- Organic and inorganic–organic thin film structures by molecular layer deposition: A review
- (2014) Pia Sundberg et al. Beilstein Journal of Nanotechnology
- Lifetime assessment of atomic-layer-deposited Al2O3–Parylene C bilayer coating for neural interfaces using accelerated age testing and electrochemical characterization
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- Parylene Interposer as Thin Flexible 3-D Packaging Enabler for Wireless Applications
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- Development of hafnium based high-k materials—A review
- (2011) J.H. Choi et al. MATERIALS SCIENCE & ENGINEERING R-REPORTS
- Spectroscopic ellipsometry and positron annihilation investigation of sputtered HfO2 films
- (2011) Z.W. Ma et al. THIN SOLID FILMS
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- (2010) Christina Hassler et al. JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS
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- (2008) D.W.L. Hukins et al. MEDICAL ENGINEERING & PHYSICS
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- (2007) M. Schindler et al. Physica Status Solidi-Rapid Research Letters
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