Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices

Authors

Keywords

Journal

Volume 60, Issue 10, Pages 2943-2951

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2013-06-07

DOI

10.1109/tbme.2013.2266542

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