Electron beam induced local crystallization of HfO2 nanopores for biosensing applications
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Title
Electron beam induced local crystallization of HfO2 nanopores for biosensing applications
Authors
Keywords
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Journal
Nanoscale
Volume 5, Issue 22, Pages 10887
Publisher
Royal Society of Chemistry (RSC)
Online
2013-08-08
DOI
10.1039/c3nr02608f
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