Development of hafnium based high-k materials—A review

Published 2011 View Full Article

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Title
Development of hafnium based high-k materials—A review
Authors
Keywords
-
Journal
MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume 72, Issue 6, Pages 97-136
Publisher
Elsevier BV
Online
2011-01-16
DOI
10.1016/j.mser.2010.12.001

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