The role of oxygen plasma in the formation of oxygen defects in HfOx films deposited at room temperature

Title
The role of oxygen plasma in the formation of oxygen defects in HfOx films deposited at room temperature
Authors
Keywords
-
Journal
Journal of Materials Chemistry C
Volume 3, Issue 16, Pages 4104-4114
Publisher
Royal Society of Chemistry (RSC)
Online
2015-03-09
DOI
10.1039/c4tc02838d

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