The role of oxygen plasma in the formation of oxygen defects in HfOx films deposited at room temperature

标题
The role of oxygen plasma in the formation of oxygen defects in HfOx films deposited at room temperature
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 3, Issue 16, Pages 4104-4114
出版商
Royal Society of Chemistry (RSC)
发表日期
2015-03-09
DOI
10.1039/c4tc02838d

向作者/读者发起求助以获取更多资源

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started