The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors

Published 2008 View Full Article

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Title
The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 5, Pages 054510
Publisher
AIP Publishing
Online
2008-09-11
DOI
10.1063/1.2973687
References
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