High performance solution-deposited amorphous indium gallium zinc oxide thin film transistors by oxygen plasma treatment

Title
High performance solution-deposited amorphous indium gallium zinc oxide thin film transistors by oxygen plasma treatment
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 20, Pages 202106
Publisher
AIP Publishing
Online
2012-05-17
DOI
10.1063/1.4718022

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