High-Performance a-IGZO TFT With $\hbox{ZrO}_{2}$ Gate Dielectric Fabricated at Room Temperature

Title
High-Performance a-IGZO TFT With $\hbox{ZrO}_{2}$ Gate Dielectric Fabricated at Room Temperature
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 31, Issue 3, Pages 225-227
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-02-16
DOI
10.1109/led.2009.2038806

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