Low-temperature ozone passivation for improving the quality of sputtered HfOx thin-film

Published 2009 View Full Article

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Title
Low-temperature ozone passivation for improving the quality of sputtered HfOx thin-film
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 63, Issue 22, Pages 1914-1916
Publisher
Elsevier BV
Online
2009-06-12
DOI
10.1016/j.matlet.2009.05.074

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