The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

(2013) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

(2013) R. Matloub et al.   APPLIED PHYSICS LETTERS

Bandgap in Al1−xScxN

(2013) Ruopeng Deng et al.   APPLIED PHYSICS LETTERS

Efficient stochastic generation of special quasirandom structures

(2013) A. van de Walle et al.   CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY

Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop

(2013) M Kucera et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

(2012) M. Schneider et al.   APPLIED PHYSICS LETTERS

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

(2012) Agne Zukauskaite et al.   JOURNAL OF APPLIED PHYSICS

Piezoelectric aluminum nitride thin films for microelectromechanical systems

(2012) Gianluca Piazza et al.   MRS BULLETIN

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

(2011) Ramin Matloub et al.   APPLIED PHYSICS LETTERS

Increased electromechanical coupling in w−ScxAl1−xN

(2010) Gunilla Wingqvist et al.   APPLIED PHYSICS LETTERS

Factors increasing the caries risk of second primary molars in 5-year-old Dutch children

(2010) Marlies E. C. ELFRINK et al.   International Journal of Paediatric Dentistry

Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations

(2010) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

(2010) Ferenc Tasnádi et al.   PHYSICAL REVIEW LETTERS

Nanoenabled microelectromechanical sensor for volatile organic chemical detection

(2009) Chiara Zuniga et al.   APPLIED PHYSICS LETTERS

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

(2009) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

(2009) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

(2009) Joseph C Doll et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

(2008) Morito Akiyama et al.   ADVANCED MATERIALS