Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

(2011) Ramin Matloub et al.   APPLIED PHYSICS LETTERS

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

(2011) Milena Moreira et al.   VACUUM

Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system

(2010) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

(2010) Ferenc Tasnádi et al.   PHYSICAL REVIEW LETTERS

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

(2008) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices

(2008) P.D. Mitcheson et al.   PROCEEDINGS OF THE IEEE