The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films
出版年份 2014 全文链接
标题
The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 19, Pages 193505
出版商
AIP Publishing
发表日期
2014-05-20
DOI
10.1063/1.4876260
参考文献
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