Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Title
Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 9, Pages 092903
Publisher
AIP Publishing
Online
2011-08-31
DOI
10.1063/1.3629773

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