Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

(2011) Ramin Matloub et al.   APPLIED PHYSICS LETTERS

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

(2011) Milena Moreira et al.   VACUUM

Increased electromechanical coupling in w−ScxAl1−xN

(2010) Gunilla Wingqvist et al.   APPLIED PHYSICS LETTERS

Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations

(2010) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

Highly piezoelectric AlN thin films grown on amorphous, insulating substrates

(2010) Alvaro Artieda et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

(2010) Ferenc Tasnádi et al.   PHYSICAL REVIEW LETTERS

Age hardening in arc-evaporated ZrAlN thin films

(2010) L. Rogström et al.   SCRIPTA MATERIALIA

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

(2009) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

(2009) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

When group-III nitrides go infrared: New properties and perspectives

(2009) Junqiao Wu   JOURNAL OF APPLIED PHYSICS

ScAlN nanowires: A cathodoluminescence study

(2009) T. Bohnen et al.   JOURNAL OF CRYSTAL GROWTH

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

(2008) Morito Akiyama et al.   ADVANCED MATERIALS

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

(2008) Morito Akiyama et al.   APPLIED PHYSICS LETTERS