Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

(2011) Ramin Matloub et al.   APPLIED PHYSICS LETTERS

Giant Piezoelectricity on Si for Hyperactive MEMS

(2011) S. H. Baek et al.   SCIENCE

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

(2011) Milena Moreira et al.   VACUUM

Increased electromechanical coupling in w−ScxAl1−xN

(2010) Gunilla Wingqvist et al.   APPLIED PHYSICS LETTERS

Grain size dependence of properties in lead nickel niobate-lead zirconate titanate films

(2010) F. Griggio et al.   JOURNAL OF APPLIED PHYSICS

Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations

(2010) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

Modeling and characterization of MEMS-based piezoelectric harvesting devices

(2010) T M Kamel et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

(2010) Ferenc Tasnádi et al.   PHYSICAL REVIEW LETTERS

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

(2009) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Piezoelectric Properties of (K,Na)NbO3Films Deposited by RF Magnetron Sputtering

(2008) Kenji Shibata et al.   Applied Physics Express

A Wireless Sensor Network Compatible Triaxial Accelerometer: Application for Detection of Falls in the Elderly

(2008) Amit Purwar et al.   Sensor Letters

Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

(2008) K A Cook-Chennault et al.   Smart Materials and Structures