Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

Title
Aluminum nitride on titanium for CMOS compatible piezoelectric transducers
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 2, Pages 025008
Publisher
IOP Publishing
Online
2009-12-19
DOI
10.1088/0960-1317/20/2/025008

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