Inorganic block copolymer lithography

Published 2012 View Full Article

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Title
Inorganic block copolymer lithography
Authors
Keywords
-
Journal
POLYMER
Volume 54, Issue 4, Pages 1269-1284
Publisher
Elsevier BV
Online
2012-11-29
DOI
10.1016/j.polymer.2012.11.057

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