Fabrication of Ordered, Large Scale, Horizontally-Aligned Si Nanowire Arrays Based on an In Situ Hard Mask Block Copolymer Approach
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Title
Fabrication of Ordered, Large Scale, Horizontally-Aligned Si Nanowire Arrays Based on an In Situ Hard Mask Block Copolymer Approach
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 26, Issue 8, Pages 1207-1216
Publisher
Wiley
Online
2013-11-26
DOI
10.1002/adma.201304096
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