Sub-5 nm Domains in Ordered Poly(cyclohexylethylene)-block-poly(methyl methacrylate) Block Polymers for Lithography

Title
Sub-5 nm Domains in Ordered Poly(cyclohexylethylene)-block-poly(methyl methacrylate) Block Polymers for Lithography
Authors
Keywords
-
Journal
MACROMOLECULES
Volume 47, Issue 4, Pages 1411-1418
Publisher
American Chemical Society (ACS)
Online
2014-02-11
DOI
10.1021/ma4020164

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