Directed self-assembly of block copolymers for nanocircuitry fabrication

Published 2015 View Full Article

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Title
Directed self-assembly of block copolymers for nanocircuitry fabrication
Authors
Keywords
Block copolymer lithography, Chemical epitaxy, Physical epitaxy, Pattern transfer, Process flows, Defectivity
Journal
MICROELECTRONIC ENGINEERING
Volume 132, Issue -, Pages 207-217
Publisher
Elsevier BV
Online
2014-08-28
DOI
10.1016/j.mee.2014.08.009

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