Surface passivation and implications on high mobility channel performance (Invited Paper)

标题
Surface passivation and implications on high mobility channel performance (Invited Paper)
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1544-1549
出版商
Elsevier BV
发表日期
2009-03-12
DOI
10.1016/j.mee.2009.03.030

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