In0.53Ga0.47As based metal oxide semiconductor capacitors with atomic layer deposition ZrO2 gate oxide demonstrating low gate leakage current and equivalent oxide thickness less than 1nm

标题
In0.53Ga0.47As based metal oxide semiconductor capacitors with atomic layer deposition ZrO2 gate oxide demonstrating low gate leakage current and equivalent oxide thickness less than 1nm
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 222904
出版商
AIP Publishing
发表日期
2008-06-04
DOI
10.1063/1.2931031

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