Hafnium oxide/germanium oxynitride gate stacks on germanium: Capacitance scaling and interface state density

标题
Hafnium oxide/germanium oxynitride gate stacks on germanium: Capacitance scaling and interface state density
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 94, Issue 18, Pages 183102
出版商
AIP Publishing
发表日期
2009-05-05
DOI
10.1063/1.3116624

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