S passivation of GaAs and band bending reduction upon atomic layer deposition of HfO2/Al2O3 nanolaminates

标题
S passivation of GaAs and band bending reduction upon atomic layer deposition of HfO2/Al2O3 nanolaminates
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 93, Issue 6, Pages 061907
出版商
AIP Publishing
发表日期
2008-08-16
DOI
10.1063/1.2961003

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