Review and Perspective of Hf-based High-kGate Dielectrics on Silicon

Development of hafnium based high-k materials—A review

(2011) J.H. Choi et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Integrations and challenges of novel high-k gate stacks in advanced CMOS technology

(2011) Gang He et al.   PROGRESS IN MATERIALS SCIENCE

Composition optimization and UV-annealing dependence on the electrical properties of Hf1−xSixO2/Si gate stacks

(2010) G. He et al.   SURFACE AND INTERFACE ANALYSIS

Effects of barium incorporation into HfO2 gate dielectrics on reduction in charged defects: First-principles study

(2009) Naoto Umezawa   APPLIED PHYSICS LETTERS

Change of the trap energy levels of the atomic layer deposited HfLaOx films with different La concentration

(2009) Chee-Hong An et al.   APPLIED PHYSICS LETTERS

Fabrication and characterization of La-doped HfO2 gate dielectrics by metal-organic chemical vapor deposition

(2009) Liu-Ying Huang et al.   APPLIED SURFACE SCIENCE

Characteristics of high-quality HfSiON gate dielectric prepared by physical vapour deposition

(2009) Xu Gao-Bo et al.   Chinese Physics B

Characterization of the interface between the Hf-based high-k thin film and the Si using spatially resolved electron energy-loss spectroscopy

(2009) X.F. Wang et al.   MICRON

Dielectric and structural properties of thin SrHfO3 layers on TiN

(2008) G. Lupina et al.   APPLIED PHYSICS LETTERS

Permittivity enhancement of hafnium dioxide high-κ films by cerium doping

(2008) P. R. Chalker et al.   APPLIED PHYSICS LETTERS

Thin BaHfO3 high-k dielectric layers on TiN for memory capacitor applications

(2008) G. Lupina et al.   APPLIED PHYSICS LETTERS

Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (100) by radio frequency sputtering at different deposition temperatures

(2008) L.Q. Zhu et al.   APPLIED SURFACE SCIENCE

Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation

(2008) K. Cherkaoui et al.   JOURNAL OF APPLIED PHYSICS