Thin BaHfO3 high-k dielectric layers on TiN for memory capacitor applications

Published 2008 View Full Article

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Title
Thin BaHfO3 high-k dielectric layers on TiN for memory capacitor applications
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 6, Pages 062906
Publisher
AIP Publishing
Online
2008-02-15
DOI
10.1063/1.2842426

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