A comparative study of atomic layer deposition of Al2O3 and HfO2 on AlGaN/GaN
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Title
A comparative study of atomic layer deposition of Al2O3 and HfO2 on AlGaN/GaN
Authors
Keywords
HfO2, Atomic Layer Deposition, Valence Band Maximum, Conduction Band Edge, Metal Insulator Semiconductor
Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 26, Issue 7, Pages 4638-4643
Publisher
Springer Nature
Online
2015-03-12
DOI
10.1007/s10854-015-2926-2
References
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Related references
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