Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN
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Title
Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 22, Pages 221604
Publisher
AIP Publishing
Online
2013-11-27
DOI
10.1063/1.4833836
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