In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN

Title
In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 21, Pages 211604
Publisher
AIP Publishing
Online
2012-11-22
DOI
10.1063/1.4767520

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started