In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN
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Title
In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 21, Pages 211604
Publisher
AIP Publishing
Online
2012-11-22
DOI
10.1063/1.4767520
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