HfO2 on MoS2 by Atomic Layer Deposition: Adsorption Mechanisms and Thickness Scalability

Published 2013 View Full Article

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Title
HfO2 on MoS2 by Atomic Layer Deposition: Adsorption Mechanisms and Thickness Scalability
Authors
Keywords
-
Journal
ACS Nano
Volume 7, Issue 11, Pages 10354-10361
Publisher
American Chemical Society (ACS)
Online
2013-10-14
DOI
10.1021/nn404775u

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