A practical guide for the fabrication of microfluidic devices using glass and silicon

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(2016)   Biotechnology Journal

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(2016)   Small

Micromachining of Pyrex 7740 Glass by Silicon Molding and Vacuum Anodic Bonding

(2011) Junwen Liu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics

(2011) A T Ciftlik et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis

(2011) Lauri Sainiemi et al.   LAB ON A CHIP

Beyond PDMS: off-stoichiometry thiol–ene (OSTE) based soft lithography for rapid prototyping of microfluidic devices

(2011) Carl Fredrik Carlborg et al.   LAB ON A CHIP

Integrated liquid chromatography–heated nebulizer microchip for mass spectrometry

(2010) Markus Haapala et al.   ANALYTICA CHIMICA ACTA

Fabrication of microfluidic devices using polydimethylsiloxane

(2010) James Friend et al.   Biomicrofluidics

A perspective on microfluidic biofuel cells

(2010) Jin wook Lee et al.   Biomicrofluidics

A dielectrophoretic chip with a roughened metal surface for on-chip surface-enhanced Raman scattering analysis of bacteria

(2010) I-Fang Cheng et al.   Biomicrofluidics

A miniaturized continuous dielectrophoretic cell sorter and its applications

(2010) Ana Valero et al.   Biomicrofluidics

Review Article—Dielectrophoresis: Status of the theory, technology, and applications

(2010) Ronald Pethig   Biomicrofluidics

Synthesis of micro and nanostructures in microfluidic systems

(2010) Samuel Marre et al.   CHEMICAL SOCIETY REVIEWS

Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications

(2010) Daniel Mark et al.   CHEMICAL SOCIETY REVIEWS

Thin Film Ag Masking for Deep Glass Micromachining

(2010) Hing Wah Lee et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Single-cell microfluidic impedance cytometry: a review

(2010) Tao Sun et al.   Microfluidics and Nanofluidics

Dielectrophoretic field-flow method for separating particle populations in a chip with asymmetric electrodes

(2009) Ciprian Iliescu et al.   Biomicrofluidics

Cell Culture on MEMS Platforms: A Review

(2009) Ming Ni et al.   INTERNATIONAL JOURNAL OF MOLECULAR SCIENCES

Microfabricated planar glass gas chromatography with photoionization detection

(2009) Alastair C. Lewis et al.   JOURNAL OF CHROMATOGRAPHY A

Characterization of High-Pressure $\hbox{XeF}_{2}$ Vapor-Phase Silicon Etching for MEMS Processing

(2009) C. Easter et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Study on bisbenzocyclobutene bonding for the development of a Si-based miniaturized reformer of fuel cell systems

(2009) Dae-Hyun Choi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Frequency dependence on the accuracy of electrical impedance spectroscopy measurements in microfluidic devices

(2009) Ciprian Iliescu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Deep etching of glass wafers using sputtered molybdenum masks

(2009) Frederik Ceyssens et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Microfluidic heated gas jet shape analysis by temperature scanning

(2009) Ville Saarela et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment

(2009) H V Jansen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Magnetic connectors for microfluidic applications

(2009) Javier Atencia et al.   LAB ON A CHIP

Mind the gap!

(2009) Holger Becker   LAB ON A CHIP

Wet-etching of structures with straight facets and adjustable taper into glass substrates

(2009) Nikola Pekas et al.   LAB ON A CHIP

Localised laser joining of glass to silicon with BCB intermediate layer

(2009) Qiang Wu et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Anodic bonding of glasses with interlayers for fully transparent device applications

(2009) Piotr Mrozek   SENSORS AND ACTUATORS A-PHYSICAL

Nanofluidic Devices and Their Applications

(2008) Patrick Abgrall et al.   ANALYTICAL CHEMISTRY

Calcium-Assisted Glass-to-Glass Bonding for Fabrication of Glass Microfluidic Devices

(2008) Peter B. Allen et al.   ANALYTICAL CHEMISTRY

Titanium-based dielectrophoresis devices for microfluidic applications

(2008) Y. T. Zhang et al.   BIOMEDICAL MICRODEVICES

Glass-based nanofluidic device for biomolecule preconcentration study

(2008) P. Svarnas et al.   EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS

Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs

(2008) Junseok Chae et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Wafer level packaging of MEMS

(2008) Masayoshi Esashi   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Deep plasma etching of glass for fluidic devices with different mask materials

(2008) Kai Kolari et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Room temperature UV adhesive bonding of CE devices

(2008) Susan Carroll et al.   LAB ON A CHIP

High-pressure needle interface for thermoplastic microfluidics

(2008) C. F. Chen et al.   LAB ON A CHIP

Wafer-level BCB bonding using a thermal press for microfluidics

(2008) Xiaodong Zhou et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Three-dimensional microfluidic devices fabricated in layered paper and tape

(2008) A. W. Martinez et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Artificial molecular sieves and filters: a new paradigm for biomolecule separation

(2008) Jianping Fu et al.   TRENDS IN BIOTECHNOLOGY

On the wet etching of Pyrex glass

(2007) Ciprian Iliescu et al.   SENSORS AND ACTUATORS A-PHYSICAL