On the wet etching of Pyrex glass

Published 2007 View Full Article

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Title
On the wet etching of Pyrex glass
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 143, Issue 1, Pages 154-161
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.sna.2007.11.022

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