Study on bisbenzocyclobutene bonding for the development of a Si-based miniaturized reformer of fuel cell systems

Title
Study on bisbenzocyclobutene bonding for the development of a Si-based miniaturized reformer of fuel cell systems
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 075013
Publisher
IOP Publishing
Online
2009-06-24
DOI
10.1088/0960-1317/19/7/075013

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