Micromachining of Pyrex 7740 Glass by Silicon Molding and Vacuum Anodic Bonding

Published 2011 View Full Article

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Title
Micromachining of Pyrex 7740 Glass by Silicon Molding and Vacuum Anodic Bonding
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 4, Pages 909-915
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-07-14
DOI
10.1109/jmems.2011.2160043

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