Thin Film Ag Masking for Deep Glass Micromachining

Published 2010 View Full Article

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Title
Thin Film Ag Masking for Deep Glass Micromachining
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 13, Issue 11, Pages H399
Publisher
The Electrochemical Society
Online
2010-09-10
DOI
10.1149/1.3483163
References
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