Deep plasma etching of glass for fluidic devices with different mask materials

Published 2008 View Full Article

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Title
Deep plasma etching of glass for fluidic devices with different mask materials
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 064010
Publisher
IOP Publishing
Online
2008-05-14
DOI
10.1088/0960-1317/18/6/064010

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