Atomic Layer Deposition Assisted Pattern Multiplication of Block Copolymer Lithography for 5 nm Scale Nanopatterning
出版年份 2014 全文链接
标题
Atomic Layer Deposition Assisted Pattern Multiplication of Block Copolymer Lithography for 5 nm Scale Nanopatterning
作者
关键词
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出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 24, Issue 27, Pages 4343-4348
出版商
Wiley
发表日期
2014-04-04
DOI
10.1002/adfm.201304248
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- (2013) Hyunwoo Lee et al. JOURNAL OF ELECTROANALYTICAL CHEMISTRY
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- (2013) Se Jin Ku et al. NANOTECHNOLOGY
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- (2013) Bong Hoon Kim et al. Soft Matter
- Emerging trends in metal-containing block copolymers: synthesis, self-assembly, and nanomanufacturing applications
- (2013) Muruganathan Ramanathan et al. Journal of Materials Chemistry C
- Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al2O3 Films and Teflon Substrates
- (2012) Shih-Hui Jen et al. ACS Applied Materials & Interfaces
- Oligosaccharide/Silicon-Containing Block Copolymers with 5 nm Features for Lithographic Applications
- (2012) Julia D. Cushen et al. ACS Nano
- High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates
- (2012) Xiaodan Gu et al. ADVANCED MATERIALS
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- (2012) Yu-Chih Tseng et al. ADVANCED MATERIALS
- Large-area, highly oriented lamellar block copolymer nanopatterning directed by graphoepitaxially assembled cylinder nanopatterns
- (2012) Hyoung-Seok Moon et al. JOURNAL OF MATERIALS CHEMISTRY
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- (2012) Ming-Hua Shiao et al. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Efficient Hydrogenated Amorphous Silicon Thin-Film Solar Cells Using Zinc Oxide Deposited by Atomic Layer Deposition as a Protective Interfacial Layer
- (2012) Young-Joo Lee et al. Journal of Physical Chemistry C
- Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains
- (2012) C. M. Bates et al. SCIENCE
- Directed Self-Assembly with Sub-100 Degrees Celsius Processing Temperature, Sub-10 Nanometer Resolution, and Sub-1 Minute Assembly Time
- (2012) Woon Ik Park et al. Small
- Air-Stable Inverted Organic Solar Cells with an Ultrathin Electron-Transport Layer Made by Atomic Layer Deposition
- (2012) Y.-J. Kang et al. ECS Solid State Letters
- Three-Dimensional Multilayered Nanostructures with Controlled Orientation of Microdomains from Cross-Linkable Block Copolymers
- (2011) Hyunjung Jung et al. ACS Nano
- A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
- (2011) Qing Peng et al. ACS Nano
- Mussel-Inspired Block Copolymer Lithography for Low Surface Energy Materials of Teflon, Graphene, and Gold
- (2011) Bong Hoon Kim et al. ADVANCED MATERIALS
- Ultralarge-area block copolymer lithography via soft graphoepitaxy
- (2011) Seong-Jun Jeong et al. JOURNAL OF MATERIALS CHEMISTRY
- Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
- (2011) Yu-Chih Tseng et al. Journal of Physical Chemistry C
- Atomic Layer Deposition of Ta-doped TiO2 Electrodes for Dye-Sensitized Solar Cells
- (2011) Ji-Hwan Choi et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Ultralarge-Area Block Copolymer Lithography Enabled by Disposable Photoresist Prepatterning
- (2010) Seong-Jun Jeong et al. ACS Nano
- Sub-Nanometer Level Size Tuning of a Monodisperse Nanoparticle Array Via Block Copolymer Lithography
- (2010) Dong Ok Shin et al. ADVANCED FUNCTIONAL MATERIALS
- Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
- (2010) Qing Peng et al. ADVANCED MATERIALS
- One-Dimensional Metal Nanowire Assembly via Block Copolymer Soft Graphoepitaxy
- (2010) Seong-Jun Jeong et al. NANO LETTERS
- A Path to Ultranarrow Patterns Using Self-Assembled Lithography
- (2010) Yeon Sik Jung et al. NANO LETTERS
- Peptide-templating dye-sensitized solar cells
- (2010) Tae Hee Han et al. NANOTECHNOLOGY
- Fabrication and Electrochemical Characterization of TiO2 Three-Dimensional Nanonetwork Based on Peptide Assembly
- (2009) Sung-Wook Kim et al. ACS Nano
- Spontaneous Lamellar Alignment in Thickness-Modulated Block Copolymer Films
- (2009) Bong Hoon Kim et al. ADVANCED FUNCTIONAL MATERIALS
- Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication
- (2009) Elizabeth A. Costner et al. Annual Review of Materials Research
- Atomic Layer Deposition: An Overview
- (2009) Steven M. George CHEMICAL REVIEWS
- Highly entangled hollow TiO2 nanoribbons templating diphenylalanine assembly
- (2009) Tae Hee Han et al. JOURNAL OF MATERIALS CHEMISTRY
- A Decade of Step and Flash Imprint Lithography
- (2009) C. Grant Wilson JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
- Small-molecule-directed nanoparticle assembly towards stimuli-responsive nanocomposites
- (2009) Yue Zhao et al. NATURE MATERIALS
- Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
- (2009) S. Park et al. SCIENCE
- Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers
- (2008) Seong-Jun Jeong et al. ADVANCED MATERIALS
- Hierarchical Self-Assembly of Block Copolymers for Lithography-Free Nanopatterning
- (2008) Bong Hoon Kim et al. ADVANCED MATERIALS
- Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer
- (2008) Yeon Sik Jung et al. NANO LETTERS
- Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
- (2008) C. Tang et al. SCIENCE
- Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
- (2008) R. Ruiz et al. SCIENCE
- Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates
- (2008) I. Bita et al. SCIENCE
- TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2] Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
- (2007) Woojin Jeon et al. ELECTROCHEMICAL AND SOLID STATE LETTERS
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