Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays

Published 2008 View Full Article

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Title
Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
Authors
Keywords
-
Journal
SCIENCE
Volume 322, Issue 5900, Pages 429-432
Publisher
American Association for the Advancement of Science (AAAS)
Online
2008-09-26
DOI
10.1126/science.1162950

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