Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

Published 2009 View Full Article

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Title
Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication
Authors
Keywords
-
Journal
Annual Review of Materials Research
Volume 39, Issue 1, Pages 155-180
Publisher
Annual Reviews
Online
2009-07-07
DOI
10.1146/annurev-matsci-082908-145336

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