Ultralarge-area block copolymer lithography via soft graphoepitaxy

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

(2010) Joy Y. Cheng et al.   ACS Nano

Ultralarge-Area Block Copolymer Lithography Enabled by Disposable Photoresist Prepatterning

(2010) Seong-Jun Jeong et al.   ACS Nano

One-Dimensional Metal Nanowire Assembly via Block Copolymer Soft Graphoepitaxy

(2010) Seong-Jun Jeong et al.   NANO LETTERS

A Path to Ultranarrow Patterns Using Self-Assembled Lithography

(2010) Yeon Sik Jung et al.   NANO LETTERS

Complex self-assembled patterns using sparse commensurate templates with locally varying motifs

(2010) Joel K. W. Yang et al.   Nature Nanotechnology

Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement

(2009) Seong-Jun Jeong et al.   NANO LETTERS

Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order

(2009) S. Park et al.   SCIENCE

Block copolymer multiple patterning integrated with conventional ArFlithography

(2009) Seung Hak Park et al.   Soft Matter

Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

(2008) Seong-Jun Jeong et al.   ADVANCED MATERIALS

Dense Self-Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers

(2008) Joy Y. Cheng et al.   ADVANCED MATERIALS

Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays

(2008) C. Tang et al.   SCIENCE

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE