Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review

The sputtering of AlN films on top of on- and off-axis 3C-SiC (111)/Si (111) substrates at various substrate temperatures

(2017) A. Iqbal et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

(1 0 1) and (0 0 2) oriented AlN thin films deposited by sputtering

(2017) A. Taurino et al.   MATERIALS LETTERS

Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

(2017) Y.Q. Fu et al.   PROGRESS IN MATERIALS SCIENCE

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

(2017) Cristina Besleaga et al.   Nanomaterials

Effect of sputtering pressure on crystalline quality and residual stress of AlN films deposited at 823 K on nitrided sapphire substrates by pulsed DC reactive sputtering

(2016) Makoto Ohtsuka et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Controlled sputtering of AlN (002) and (101) crystal orientations on epitaxial 3C-SiC-on-Si (100) substrate

(2016) A. Iqbal et al.   JOURNAL OF CRYSTAL GROWTH

Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

(2015) G.E. Stan et al.   APPLIED SURFACE SCIENCE

Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties

(2015) Genshui Ke et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Effect of substrate temperature and bias voltage on the properties in DC magnetron sputtered AlN films on glass substrates

(2015) J. Wang et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

(2014) C. Stoeckel et al.   JOURNAL OF APPLIED PHYSICS

A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films

(2014) Xiaomeng Bi et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

AlN thin films deposited on different Si-based substrates through RF magnetron sputtering

(2014) Xiangquan Jiao et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices

(2014) Wei-Che Shih et al.   Journal of Nanomaterials

AlN thin films deposited by DC reactive magnetron sputtering: effect of oxygen on film growth

(2013) Javier García Molleja et al.   EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS

Growth of AlN Films as a Function of Temperature on Mo Films Deposited by Different Techniques

(2013) Jie Yang et al.   JOURNAL OF ELECTRONIC MATERIALS

Two-step method for the deposition of AlN by radio frequency sputtering

(2013) L. Monteagudo-Lerma et al.   THIN SOLID FILMS

Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures

(2013) K. Ait Aissa et al.   THIN SOLID FILMS

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

(2012) A. Ababneh et al.   APPLIED SURFACE SCIENCE

Influence of sputtering parameters on structures and residual stress of AlN films deposited by DC reactive magnetron sputtering at room temperature

(2012) H.Y. Liu et al.   JOURNAL OF CRYSTAL GROWTH

Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering

(2012) Hao Jin et al.   JOURNAL OF ELECTRONIC MATERIALS

Residual stress of AlN films RF sputter deposited on Si(111) substrate

(2012) Hui Zhong et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited onc-Plane Sapphire

(2012) Sheng-Rui Jian et al.   Journal of Nanomaterials

Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

(2011) G.F. Iriarte et al.   APPLIED SURFACE SCIENCE

Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

(2011) Atul Vir Singh et al.   APPLIED SURFACE SCIENCE

The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering

(2011) Duy-Thach Phan et al.   APPLIED SURFACE SCIENCE

Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application

(2011) A. Kale et al.   APPLIED SURFACE SCIENCE

Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators

(2011) J.G. Rodríguez-Madrid et al.   MATERIALS LETTERS

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

(2011) L. García-Gancedo et al.   SENSORS AND ACTUATORS B-CHEMICAL

Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating

(2011) Atul Vir Singh et al.   THIN SOLID FILMS

Micro-structural and optical properties of reactive magnetron sputtered Aluminum Nitride (AlN) nanostructured films

(2010) B. Subramanian et al.   CURRENT APPLIED PHYSICS

Epitaxial piezoelectric MEMS on silicon

(2010) D Isarakorn et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

(2010) A. Ababneh et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering

(2010) M.A. Moreira et al.   MICROELECTRONIC ENGINEERING

Single-crystalline AlN growth on sapphire using physical vapor deposition

(2010) Andres M. Cardenas-Valencia et al.   PHYSICS LETTERS A

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

(2009) R Elfrink et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

AlN films sputtered on iridium electrodes for bulk acoustic wave resonators

(2009) M. Clement et al.   THIN SOLID FILMS

Thickness and substrate effects on AlN thin film growth at room temperature

(2008) B. Abdallah et al.   EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS

Structure, mechanical and corrosion properties of DC reactive magnetron sputtered aluminum nitride (AlN) hard coatings on mild steel substrates

(2008) B. Subramanian et al.   JOURNAL OF APPLIED ELECTROCHEMISTRY

Impact of magnetron configuration on plasma and film properties of sputtered aluminum nitride thin films

(2008) C. Duquenne et al.   JOURNAL OF APPLIED PHYSICS

Influence of sputtering parameters on the crystallinity and crystal orientation of AlN layers deposited by RF sputtering using the AlN target

(2008) Z. Vashaei et al.   JOURNAL OF CRYSTAL GROWTH

Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

(2008) K A Cook-Chennault et al.   Smart Materials and Structures

Two-step reactive sputtering of piezoelectric AlN thin films

(2008) J.S. Cherng et al.   SURFACE & COATINGS TECHNOLOGY

Effects of outgassing on the reactive sputtering of piezoelectric AlN thin films

(2007) J.S. Cherng et al.   THIN SOLID FILMS