The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Authors

Keywords

Journal

Volume 172, Issue 3, Pages 253-258

Publisher

Elsevier BV

Online

2010-06-17

DOI

10.1016/j.mseb.2010.05.026

Explore over 38,000 international journals covering a vast array of academic fields.

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now