Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
出版年份 2018 全文链接
标题
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review
作者
关键词
-
出版物
SENSORS
Volume 18, Issue 6, Pages 1797
出版商
MDPI AG
发表日期
2018-06-04
DOI
10.3390/s18061797
参考文献
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