Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating

Published 2011 View Full Article

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Title
Deposition and characterization of c-axis oriented aluminum nitride films by radio frequency magnetron sputtering without external substrate heating
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 18, Pages 5846-5853
Publisher
Elsevier BV
Online
2011-03-08
DOI
10.1016/j.tsf.2011.02.074

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