Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices

Title
Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices
Authors
Keywords
-
Journal
Journal of Nanomaterials
Volume 2014, Issue -, Pages 1-10
Publisher
Hindawi Limited
Online
2014-04-08
DOI
10.1155/2014/643672

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