Effect of forming gas annealing on the degradation properties of Ge-based MOS stacks
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Title
Effect of forming gas annealing on the degradation properties of Ge-based MOS stacks
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 13, Pages 134103
Publisher
AIP Publishing
Online
2018-04-06
DOI
10.1063/1.5018193
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