Germanium surface passivation and atomic layer deposition of high-kdielectrics—a tutorial review on Ge-based MOS capacitors

Published 2012 View Full Article

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Title
Germanium surface passivation and atomic layer deposition of high-kdielectrics—a tutorial review on Ge-based MOS capacitors
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 27, Issue 7, Pages 074012
Publisher
IOP Publishing
Online
2012-06-23
DOI
10.1088/0268-1242/27/7/074012

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